Active isolation of electronic micro-components with piezoelectrically transduced silicon MEMS devices
| Author(s): |
Y. Meyer
T. Verdot M. Collet J. Baborowski P. Muralt |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, February 2007, n. 1, v. 16 |
| Page(s): | 128-134 |
| DOI: | 10.1088/0964-1726/16/1/016 |
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10223375 - Published on:
04/12/2018 - Last updated on:
04/12/2018
Structurae cooperates with
