Accurate measurement of the piezoelectric coefficient of thin films by eliminating the substrate bending effect using spatial scanning laser vibrometry
| Author(s): |
Glenn J. T. Leighton
Zhaorong Huang |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, June 2010, n. 6, v. 19 |
| Page(s): | 065011 |
| DOI: | 10.1088/0964-1726/19/6/065011 |
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