Use of polymer and ceramic thin film materials to reduce the actuation voltage of a distributed micro-electromechanical system phase shifter
| Author(s): |
Taeksoo Ji
K. J. Vinoy Vijay K. Varadan |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, December 2003, n. 6, v. 12 |
| Page(s): | N9-N13 |
| DOI: | 10.1088/0964-1726/12/6/n01 |
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10216221 - Published on:
04/12/2018 - Last updated on:
04/12/2018
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