Tuning MEMS cantilever devices using photoresponsive polymers
Author(s): |
Nathan Jackson
Kamlesh Kumar Oskar Olszewski Albertus P. H. J. Schenning Michael G. Debije |
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Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, August 2019, n. 8, v. 28 |
Page(s): | 085024 |
DOI: | 10.1088/1361-665x/aad013 |
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data sheet - Reference-ID
10326700 - Published on:
21/07/2019 - Last updated on:
26/07/2019