Three-dimensional piezoelectric MEMS actuator by using sputtering deposition of Pb(Zr,Ti)O3 on microstructure sidewalls
Author(s): |
Kensuke Kanda
Shingo Moriue Takayuki Fujita Kazusuke Maenaka |
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Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, April 2017, n. 4, v. 26 |
Page(s): | 045019 |
DOI: | 10.1088/1361-665x/aa61eb |
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10215694 - Published on:
04/12/2018 - Last updated on:
04/12/2018