A theoretical solution for the angular displacement of electrostatic one-degree-of-freedom torsional microactuators
Author(s): |
Ki Bang Lee
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Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, December 2008, n. 6, v. 17 |
Page(s): | 065014 |
DOI: | 10.1088/0964-1726/17/6/065014 |
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10217079 - Published on:
04/12/2018 - Last updated on:
04/12/2018