Stabilization of electrostatic MEMS resonators using a delayed feedback controller
Author(s): |
Fadi M. Alsaleem
Mohammad I. Younis |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, March 2010, n. 3, v. 19 |
Page(s): | 035016 |
DOI: | 10.1088/0964-1726/19/3/035016 |
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04/12/2018