Smart nano-machining and measurement system with semiconductive diamond probe
| Author(s): |
Kazuya Unno
Yasutaka Kitamoto Takayuki Shibata Eiji Makino |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, August 2001, n. 4, v. 10 |
| Page(s): | 730-735 |
| DOI: | 10.1088/0964-1726/10/4/317 |
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10215523 - Published on:
04/12/2018 - Last updated on:
04/12/2018
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