A six-degree-of-freedom magnetic levitation fine stage for a high-precision and high-acceleration dual-servo stage
| Author(s): |
MyeongHyeon Kim
Jae-heon Jeong HyoYoung Kim DaeGab Gweon |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, October 2015, n. 10, v. 24 |
| Page(s): | 105022 |
| DOI: | 10.1088/0964-1726/24/10/105022 |
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10217131 - Published on:
04/12/2018 - Last updated on:
04/12/2018
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