A single-layer micromachined tunable capacitor with an electrically floating plate
| Author(s): |
Fahimullah Khan
Yong Zhu Junwei Lu Jitendra Pal Dzung Viet Dao |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, April 2016, n. 4, v. 25 |
| Page(s): | 045014 |
| DOI: | 10.1088/0964-1726/25/4/045014 |
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10226200 - Published on:
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04/12/2018
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