Performance analysis and energy saving potential of air conditioning system in semiconductor cleanrooms
Author(s): |
Jiawen Yin
Xiaohua Liu Bowen Guan Zhiyao Ma Tao Zhang |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Journal of Building Engineering, May 2021, v. 37 |
Page(s): | 102158 |
DOI: | 10.1016/j.jobe.2021.102158 |
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10542874 - Published on:
11/01/2021 - Last updated on:
19/02/2021