Performance analysis and energy saving potential of air conditioning system in semiconductor cleanrooms
Auteur(s): |
Jiawen Yin
Xiaohua Liu Bowen Guan Zhiyao Ma Tao Zhang |
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Médium: | article de revue |
Langue(s): | anglais |
Publié dans: | Journal of Building Engineering, mai 2021, v. 37 |
Page(s): | 102158 |
DOI: | 10.1016/j.jobe.2021.102158 |
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10542874 - Publié(e) le:
11.01.2021 - Modifié(e) le:
19.02.2021