A numerical study on effective arrangement of fan-filter units in a semiconductor cleanroom: Control of hazardous gas leakage from a process instrument
| Author(s): |
Chengxi Yao
Seungjae Lee Xiaojiang Wen Jaewon Lee Seokchan Lee Seulgi Choi Dongbin Huh Taesung Kim |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Building and Environment, January 2025, v. 267 |
| Page(s): | 112301 |
| DOI: | 10.1016/j.buildenv.2024.112301 |
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10811376 - Published on:
17/01/2025 - Last updated on:
17/01/2025
Structurae cooperates with
