Microsensors, microelectromechanical systems (MEMS), and electronics for smart structures and systems
Author(s): |
V. K. Varadan
V. V. Varadan |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, December 2000, n. 6, v. 9 |
Page(s): | 953-972 |
DOI: | 10.1088/0964-1726/9/6/327 |
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10215330 - Published on:
04/12/2018 - Last updated on:
04/12/2018