Micromachined pressure sensors: review and recent developments
| Author(s): |
W. P. Eaton
J. H. Smith |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, October 1997, n. 5, v. 6 |
| Page(s): | 530-539 |
| DOI: | 10.1088/0964-1726/6/5/004 |
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04/12/2018
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