Microelectromechanical systems (MEMS): fabrication, design and applications
Author(s): |
Jack W. Judy
|
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Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, December 2001, n. 6, v. 10 |
Page(s): | 1115-1134 |
DOI: | 10.1088/0964-1726/10/6/301 |
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10215676 - Published on:
04/12/2018 - Last updated on:
04/12/2018