MEMS acoustic emission transducers designed with high aspect ratio geometry
Author(s): |
H. Saboonchi
D. Ozevin |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, September 2013, n. 9, v. 22 |
Page(s): | 095006 |
DOI: | 10.1088/0964-1726/22/9/095006 |
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10225123 - Published on:
04/12/2018 - Last updated on:
04/12/2018