Measurement of piezoelectric strength of ZnO thin films for MEMS applications
| Author(s): |
Fred J. von Preissig
Hong Zeng Eun Sok Kim |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, June 1998, n. 3, v. 7 |
| Page(s): | 396-403 |
| DOI: | 10.1088/0964-1726/7/3/014 |
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04/12/2018
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