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Low frequency piezoelectric P(VDF-TrFE) micro-cantilevers with a novel MEMS process for vibration sensor and energy harvester applications

Author(s):



Medium: journal article
Language(s): English
Published in: Smart Materials and Structures, , n. 6, v. 28
Page(s): 065022
DOI: 10.1088/1361-665x/ab19d2
Structurae cannot make the full text of this publication available at this time. The full text can be accessed through the publisher via the DOI: 10.1088/1361-665x/ab19d2.
  • About this
    data sheet
  • Reference-ID
    10313243
  • Published on:
    13/05/2019
  • Last updated on:
    13/05/2019
 
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