A high-performance structure for the bulk acoustic wave metal oxide semiconductor gas sensor
Author(s): |
Zhao Luo
Qiang Tang Songfei Su Junhui Hu |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, 29 August 2019, n. 10, v. 28 |
Page(s): | 105015 |
DOI: | 10.1088/1361-665x/ab360c |
- About this
data sheet - Reference-ID
10374560 - Published on:
19/09/2019 - Last updated on:
19/09/2019