Growth and infrared switching properties of deposited VO2 films at various sputtering power with a VO2 target by RF magnetron sputtering
| Author(s): |
N. Muslim
Y. W. Soon N. Y. Voo |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | IOP Conference Series: Materials Science and Engineering, February 2020, v. 758 |
| Conference: | 7th International Conference on Mechanical Engineering, Materials Science and Civil Engineering 17–18 December 2019, Sanya, China |
| Page(s): | 012019 |
| DOI: | 10.1088/1757-899X/758/1/012019 |
| Copyright: | © 2020 N Muslim, Y W Soon, N Y Voo |
| License: | This creative work has been published under the Creative Commons Attribution 3.0 Unported (CC-BY 3.0) license which allows copying, and redistribution as well as adaptation of the original work provided appropriate credit is given to the original author and the conditions of the license are met. |
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10433339 - Published on:
25/08/2020 - Last updated on:
03/07/2021
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