Focused ion beams and silicon-on-insulator - a novel approach to MEMS
Author(s): |
Jürgen H. Daniel
David F. Moore John F. Walker |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, June 2000, n. 3, v. 9 |
Page(s): | 284-290 |
DOI: | 10.1088/0964-1726/9/3/306 |
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10215185 - Published on:
04/12/2018 - Last updated on:
04/12/2018