Flexural-standing-wave elastic force motor using ZnO and PZT thin film on micromachined silicon membranes for wristwatch applications
| Author(s): |
Georges-A Racine
Paul Muralt Marc-A Dubois |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, June 1998, n. 3, v. 7 |
| Page(s): | 404-416 |
| DOI: | 10.1088/0964-1726/7/3/015 |
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10214764 - Published on:
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04/12/2018
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