Fabrication and performance of a flat piezoelectric cantilever obtained using a sol–gel derived PZT thick film deposited on a SOI wafer
| Author(s): |
T. Kobayashi
J. Tsaur M. Ichiki R. Maeda |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, February 2006, n. 1, v. 15 |
| Page(s): | S137-S140 |
| DOI: | 10.1088/0964-1726/15/1/022 |
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04/12/2018
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