Dynamic modeling and optimization of mechanical drift for compliant parallel micromanipulation driven by V-shape linear ultrasonic motors

Designing micro-mechanisms that satisfy large strokes, high precision, and multiple degrees of freedom has consistently been a research focus and challenge in the field of micromanipulation systems. Linear ultrasonic motors (LUMs), with advantages such as millimeter-level travel, nanometer-level motion resolution, and power-off self-locking, significantly contribute to the advancement in the mechanism design of micromanipulation systems. However, the challenge of mechanical drift lacks a comprehensive theoretical analysis to explain its cause and limits its application. This paper presents a mechanical drift modeling method for a compliant parallel micromanipulation (CPM) driven by a LUM. The model primarily focuses on the creep characteristics of the flexure clamp element in the LUM. Based on the stiffness matrix analysis method of the compliant parallel mechanism kinematics, the mechanical drift dynamics model of the CPM is established. The influence of the main structural parameters on the CPM mechanical drift is investigated. The research indicates that the creep of flexure clamps in the CPM is the main factor leading to the mechanical drift. Optimization of mechanical drift is achieved by choosing flexure clamps with higher tangential stiffness for LUM and flexure hinge joints with greater flexibility for CPM. Finally, experimental studies reveal that under equivalent conditions, the mechanical drift of the optimized CPM was significantly reduced than before, proving the rationality of the theoretical model and optimization method.