Distributed MEMS phase shifters by microstereolithography on silicon substrates for microwave and millimeter wave applications
| Author(s): |
T. S. Ji
K. J. Vinoy V. K. Varadan |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, December 2001, n. 6, v. 10 |
| Page(s): | 1224-1229 |
| DOI: | 10.1088/0964-1726/10/6/311 |
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10215652 - Published on:
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04/12/2018
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