A digital output accelerometer using MEMS-based piezoelectric accelerometers and arrayed CMOS inverters with satellite capacitors
| Author(s): |
T. Kobayashi
H. Okada T. Masuda R. Maeda T. Itoh |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, June 2011, n. 6, v. 20 |
| Page(s): | 065017 |
| DOI: | 10.1088/0964-1726/20/6/065017 |
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10224469 - Published on:
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04/12/2018
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