Design and fabrication of wireless remotely readable MEMS based microaccelerometers
| Author(s): |
Hareesh Subramanian
Vijay K. Varadan Vasundara V. Varadan M. J. Vellekoop |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, December 1997, n. 6, v. 6 |
| Page(s): | 730-738 |
| DOI: | 10.1088/0964-1726/6/6/010 |
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10214660 - Published on:
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04/12/2018
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