Approaches for improving airflow uniformity in unidirectional flow cleanrooms
| Author(s): |
M. Cheng
G. R. Liu K. Y. Lam W. J. Cai E. L. Lee |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Building and Environment, May 1998, n. 3, v. 34 |
| Page(s): | 275-284 |
| DOI: | 10.1016/s0360-1323(98)00028-6 |
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26/11/2019
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