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Application of adaptive inverse compensation feedforward—MPC feedback control to AFM piezoelectric micro-positioning platform

Author(s): ORCID
ORCID
ORCID


Medium: journal article
Language(s): English
Published in: Smart Materials and Structures, , n. 7, v. 33
Page(s): 075020
DOI: 10.1088/1361-665x/ad4fcf
Structurae cannot make the full text of this publication available at this time. The full text can be accessed through the publisher via the DOI: 10.1088/1361-665x/ad4fcf.
  • About this
    data sheet
  • Reference-ID
    10783943
  • Published on:
    20/06/2024
  • Last updated on:
    20/06/2024
 
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