Using phosphoric acid-impregnated activated carbon to improve the efficiency of chemical filters for the removal of airborne molecular contaminants (AMCs) in the make-up air unit (MAU) of a cleanroom
Author(s): |
Y.-H. Kang
A. Shiue S.-C. Hu C.-Y. Huang H.-T. Chen |
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Medium: | journal article |
Language(s): | English |
Published in: | Building and Environment, April 2010, n. 4, v. 45 |
Page(s): | 929-935 |
DOI: | 10.1016/j.buildenv.2009.09.012 |
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10391219 - Published on:
26/11/2019 - Last updated on:
26/11/2019