Trajectory tracking of piezoelectric-driven stage via a hybrid controller for both periodic and non-periodic motion
Author(s): |
Yunfeng Fan
Dingguo Zhang U-Xuan Tan |
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Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, February 2019, n. 2, v. 28 |
Page(s): | 025023 |
DOI: | 10.1088/1361-665x/aaf331 |
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10296117 - Published on:
27/01/2019 - Last updated on:
27/01/2019