A study on AGV-induced floor micro-vibration in TFT-LCD high-technology fabs
| Author(s): |
Chien-Liang Lee
Yen-Po Wang Ray Kai Leung Su |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Structural Control and Health Monitoring, April 2012, n. 3, v. 19 |
| Page(s): | 451-471 |
| DOI: | 10.1002/stc.445 |
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16/12/2018
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