Structural modeling of a MEMS device: nonlinear modeling and experimental identification
Author(s): |
Y. Meyer
G. Cumunel |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, April 2010, n. 4, v. 19 |
Page(s): | 045020 |
DOI: | 10.1088/0964-1726/19/4/045020 |
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