Stress measurement in a cantilevered silicon beam undergoing coupled motion of torsion and bending
Author(s): |
Markus Egretzberger
Andreas Kugi Stefan Günthner Bernhard Hartmann |
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Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, April 2007, n. 2, v. 16 |
Page(s): | 296-304 |
DOI: | 10.1088/0964-1726/16/2/007 |
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10216975 - Published on:
04/12/2018 - Last updated on:
04/12/2018