Simulation methods for micro-electro-mechanical structures (MEMS) with application to a microtweezer
Author(s): |
F. Shi
P. Ramesh S. Mukherjee |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Computers & Structures, September 1995, n. 5, v. 56 |
Page(s): | 769-783 |
DOI: | 10.1016/0045-7949(95)00007-4 |
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10272988 - Published on:
05/01/2019 - Last updated on:
05/01/2019