Shape memory thin films formed with carrousel-type magnetron sputtering apparatus
Author(s): |
Akira Ishida
Morio Sato Osamu Tabata Wataru Yoshikawa |
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Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, October 2005, n. 5, v. 14 |
Page(s): | S216-S222 |
DOI: | 10.1088/0964-1726/14/5/008 |
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10216746 - Published on:
04/12/2018 - Last updated on:
04/12/2018