Research on the effect of nitrogen implantation doses on the structure of separation by implantation of oxygen and nitrogen
| Author(s): |
Enxia Zhang
Wanbing Yi Jing Chen Zhengxuan Zhang Xi Wang |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, August 2005, n. 4, v. 14 |
| Page(s): | N42-N45 |
| DOI: | 10.1088/0964-1726/14/4/n07 |
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10216728 - Published on:
04/12/2018 - Last updated on:
04/12/2018
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