Research on rotational rollback suppression of diamond-shaped active locking flexure mechanism (ALFM) driven by piezoelectric wafers

Piezoelectric actuators have a wide range of applications in many areas due to their advantages of fast response speed, high resolution, compact and simple structure, diverse configurations, and resistance to electromagnetic interference. However, existing piezoelectric actuators generally have large fallback, and a few researchers have applied the ALFM to the fallback suppression of actuators. In this paper, an ALFM using a piezoelectric wafer as the driving source is innovatively designed, and the structure and dimensions are simulated and optimized using Finite Element Method, according to which the piezoelectric wafer-type ALFM is used to design a new inertial piezoelectric actuator that can suppress backward movement. The motion principle of the piezoelectric actuator is theoretically analyzed, followed by the establishment of the machine dynamics model of the piezoelectric actuator and simulation with MATLAB/simulink to verify the reasonableness of the dynamics model. Finally, a series of experiments are carried out on the processed drive model, and the results show that the maximum accuracy of the actuator is 8.5 μrad, and the maximum load capacity is 160 g. The comparison experiments at 30 Hz and 40 Hz with and without the ALFM prove that the locking mechanism does supress the actuator from backing off to a certain extent, which verifies the reasonableness of the scheme proposed in this paper.