Repetitive control of an electrostatic microbridge actuator: theory and simulation
Author(s): |
Haiyu Zhao
Christopher D. Rahn |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, December 2010, n. 12, v. 19 |
Page(s): | 125006 |
DOI: | 10.1088/0964-1726/19/12/125006 |
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04/12/2018