The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film
Author(s): |
D. Isarakorn
D. Briand P. Janphuang A. Sambri S. Gariglio J.-M. Triscone F. Guy J. W. Reiner C. H. Ahn N. F. de Rooij |
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Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, January 2011, n. 2, v. 20 |
Page(s): | 025015 |
DOI: | 10.1088/0964-1726/20/2/025015 |
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10224402 - Published on:
02/12/2018 - Last updated on:
02/12/2018