Plasma etching of thermoset polymer films for microchannels
| Author(s): |
Anthony Holland
Carla Cher Gary Rosengarten Darren Simon |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, February 2006, n. 1, v. 15 |
| Page(s): | S104-S111 |
| DOI: | 10.1088/0964-1726/15/1/017 |
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04/12/2018
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