Optimized electrode coverage of membrane actuators based on epitaxial PZT thin films
Author(s): |
M. D. Nguyen
H. Nazeer M. Dekkers D. H. A. Blank G. Rijnders |
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Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, August 2013, n. 8, v. 22 |
Page(s): | 085013 |
DOI: | 10.1088/0964-1726/22/8/085013 |
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10217157 - Published on:
04/12/2018 - Last updated on:
04/12/2018