A numerical study of squeeze-film damping in MEMS-based structures including rarefaction effects
Author(s): |
Maria F. Pantano
Leonardo Pagnotta Salvatore Nigro |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Frattura ed Integrità Strutturale, December 2012, n. 23, v. 7 |
Page(s): | 103-113 |
DOI: | 10.3221/igf-esis.23.11 |
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10458625 - Published on:
25/10/2020 - Last updated on:
25/10/2020