Identification of multilayered thin-film stress from nonlinear deformation of substrate
Author(s): |
Kang Fu
|
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Journal of Mechanics of Materials and Structures, November 2013, n. 5-7, v. 8 |
Page(s): | 369-384 |
DOI: | 10.2140/jomms.2013.8.369 |
- About this
data sheet - Reference-ID
10548235 - Published on:
20/01/2021 - Last updated on:
19/02/2021