Hydrofluoric Acid Recovery from Waste Semiconductor Acid Solution by Ion Exchange
Author(s): |
Sheng H. Lin
(Professor, Chemical Engineering Dept., Yuan Ze Univ., Chungli 320, Taiwan, Republic of China.)
Jin M. Liu (Graduate Student, Chemical Engineering Dept., Yuan Ze Univ., Chungli 320, Taiwan, Republic of China.) |
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Medium: | journal article |
Language(s): | English |
Published in: | Journal of Environmental Engineering (ASCE), May 2003, n. 5, v. 129 |
Page(s): | 472-478 |
DOI: | 10.1061/(asce)0733-9372(2003)129:5(472) |
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data sheet - Reference-ID
10583595 - Published on:
08/03/2021 - Last updated on:
08/03/2021