High-precision control of piezoelectric nanopositioning stages using hysteresis compensator and disturbance observer
| Author(s): |
Guo-Ying Gu
Li-Min Zhu Chun-Yi Su |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, October 2014, n. 10, v. 23 |
| Page(s): | 105007 |
| DOI: | 10.1088/0964-1726/23/10/105007 |
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10225609 - Published on:
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04/12/2018
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