A finite-element formulation for anodic bonding
Author(s): |
Eniko T. Enikov
James G. Boyd |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, December 2000, n. 6, v. 9 |
Page(s): | 737-750 |
DOI: | 10.1088/0964-1726/9/6/302 |
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10215319 - Published on:
04/12/2018 - Last updated on:
04/12/2018