Feedback simulation of duct design for alkali exhaust system in a semiconductor factory
Author(s): |
Wen-Liang Chen
Huei-Jiunn Chen Sih-Li Chen |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Energy and Buildings, September 2006, n. 9, v. 38 |
Page(s): | 1069-1075 |
DOI: | 10.1016/j.enbuild.2005.12.004 |
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10464735 - Published on:
27/10/2020 - Last updated on:
27/10/2020