Feasibility analysis of canceling reheating after condensation dehumidification in semiconductor cleanrooms
Author(s): |
Jiawen Yin
Tao Zhang Zhiyao Ma Xiaohua Liu |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Journal of Building Engineering, November 2021, v. 43 |
Page(s): | 102589 |
DOI: | 10.1016/j.jobe.2021.102589 |
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10607404 - Published on:
15/05/2021 - Last updated on:
15/05/2021